Abstract

Precision positioning systems are more and more used in extreme environments, like deep UV light sources, electron beams and vacuum. Flexure elements for guiding the motion do not suffer from the traditional hysteresis and wear, and do not contaminate. However, they are generally used for small range of motion mechanisms, because of stress limitations and an inherent decrease in stiffness in supporting directions when deflected. In this seminar several flexure-based precision mechanisms are presented along with a fast optimization flexible multibody modeling technique. The cases are; a two-DOF mechanism with 100×100 mm range of motion and natural frequencies >100Hz, a high support stiffness, high actuation compliance hinge over a 40 degrees range of motion, a three-DOF MEMS -based stage with 200×200 m range of motion with integrated feedback, and the effects of overconstraining in flexure-based mechanisms shown in the case of an overconstrained parallel leaf-spring mechanism.

Dannis M. Brouwer received a M.Sc. degree in mechanical engineering from Eindhoven University of Technology, The Netherlands, in 1998. He received a second M.Sc. degree in mechatronics design from Eindhoven University of Technology in 2001. From 2001 to 2004, he was with Philips Center for Manufacturing Technology, as a Mechatronics System Designer. In 2007, he received the Ph.D. degree in mechanical engineering from the University of Twente, Enschede. Dannis holds a position as assistant Professor at the University of Twente, and he is with company Demcon Advanced Mechatronics. He serves as an Associate Editor for the American Society for Precision Engineering.