Abstract

MEMS scanners have advanced rapidly during the last 20 years thanks to the excellent mechanical and optical properties offered by silicon. They have been used in various display and imaging applications and products. The performance of high-resolution and high frequency MEMS laser scanners is close to meeting the demands of full HD displays (~120 Million pixels per second). Important performance metrics and the performance of various electromagnetic, electrostatic, and piezoelectric actuated MEMS scanners developed in our group will be reviewed. Second part of the talk will be about various micro-structured screen technologies and some of the emerging 3D and interactive Augmented-Reality display applications enabled by pico-projectors and MEMS scanners. Those technologies are expected to play an important role in the future of human-computer interface.