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Do Scanning Electron Microscopes have a point-spread function?

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If you have a question about this talk, please contact Christian Steinruecken .

The resolution of diffraction-limited imaging instruments like Telescopes and (wide-field) Light Microscopes is fundamentally linked to the image these systems produce of point-like objects, the so-called point spread function (psf). Both Astronomy and Biology have profited greatly from methods that try to enhance image quality by de-convolving this function out of images.

While Electron Microscope (EM) images look very similar to conventional light microscope images at first glance and the existence of a psf for EMs is often implicitly assumed, it is not clear a priori whether the imaging defects of EMs can be described by a linear filter (i.e. a psf). Monte-Carlo simulations of small, strongly scattering spheres in a bulk of weakly scattering material give an insight into the formation of single pixels in EM images and may help to enhance their quality.

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