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SUMMARY:Dielectric Elastomer Actuators with Ion Implanted Electrodes - Pro
 f. Herbert R. Shea\, Microsystems for Space Technologies Laboratory\, EPFL
 \, Switzerland
DTSTART:20091023T130000Z
DTEND:20091023T140000Z
UID:TALK20206@talks.cam.ac.uk
CONTACT:spl37
DESCRIPTION:Dielectric polymer actuators (often referred to as “artifici
 al muscles”) require electrodes that\nconduct at strains of over 40% and
  that are not stiffer than the elastomer. On the macro-scale\,\nsuch attri
 butes are readily achieved with carbon powder electrodes. When shrinking p
 olymer\nactuators to the micron scale however\, a different solution is ne
 eded.\nWe present a novel technique for making highly compliant electrodes
  on elastomers (PDMS)\nusing low-energy metal ion-implantation. This techn
 ique forms nanometer scale metallic clusters\nup to 50 nm below the PDMS s
 urface\, creating an electrode that can sustain up to 175% strain\nwhile r
 emaining conductive\, yet having only a minimal impact on the elastomer’
 s mechanical\nproperties. These electrodes are readily patterned on the μ
 m scale by masking with patterned\nphotoresist or laser-cut steel masks. T
 hey are stable in time (no resistivity or stiffness change over\n2 years) 
 and show only minor changes in electrical characteristics after 105 cycles
  of 30% strain.\nUsing these ion-implanted compliant electrodes\, we have 
 microfabricated circular diaphragm\nactuator of diameter 1.5 to 3 mm\, wit
 h voltage-controlled static out-of plane deflections of over\n25% of their
  diameter\, and response times faster than 1 ms. Lifetime tests have shown
  no\ndegradation after more than 4 million cycles at 1.5 kV. Applications 
 in tunable optics and cell\nmanipulation will be presented.\nFinally a bri
 ef overview of our lab’s other activities will be given\, in the field o
 f MEMS for space\n(micro-propulsion and inertial sensing).
LOCATION:Kapitza Building Seminar Room\, Cavendish Laboratory\, Department
  of Physics
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