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SUMMARY:3D EDS Microanalysis by FIB-SEM: limitations\, potential and persp
 ectives - Pierre Burdet\, Interdisciplinary Centre for Electron Microscopy
  (CIME)\, Federal Institute of Technology of Lausanne  	(EPFL)\, Station 1
 2\, CH-1015 Lausanne\, Switzerland
DTSTART:20120625T140000Z
DTEND:20120625T150000Z
UID:TALK38531@talks.cam.ac.uk
CONTACT:Caterina Ducati
DESCRIPTION:FIB-Tomography combines FIB milling with the imaging capabilit
 ies and the variety of detection modes of a modern SEM in order to analyse
  the structure of a sample in 3 dimensions.  Through fully automated slici
 ng and imaging\, it is possible to generate stacks of SEM images and EDS e
 lemental maps. Hence\, 3D EDS microanalysis provides low spatial resolutio
 n from SEM images and rich chemical information from EDS maps.\nGoing from
  2D EDS to 3D EDS leads to some specific limitations that are linked to ti
 me constraint and geometry. Besides\, complex microstructure can be analys
 ed\; as an example of the technique potential\, a laser weld between NiTi 
 and stainless steel is characterized.  The large scattering range of elect
 rons in a bulk sample is the main limiting factor for spatial resolution. 
 As a perspective\, a new approach is presented to enhance quantification w
 hen limited by the scattering range.\n
LOCATION:T001 [Tower Seminar Room]\, Materials Science and Metallurgy\, De
 partment of
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