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SUMMARY:CMOS compatible micro-hotplate for high temperature gas sensors ba
 sed on SOI and Deep RIE technology - Prasanta Kumar Guha\, High Voltage Mi
 croelectronics Lab\, CAPE Building\, Department of Engineering
DTSTART:20061025T100000Z
DTEND:20061025T113000Z
UID:TALK5743@talks.cam.ac.uk
CONTACT:Dr. Richard\, Yong Qing Fu
DESCRIPTION:This talk describes the design and characterisation of a new g
 eneration of fully CMOS compatible novel micro-heater for high temperature
  gas sensors. The micro-heaters employ advanced MOSFET heaters embedded in
  an SOI membrane. The micro-heaters are required to heat up the sensing ma
 terial\, so that it can reacts with the gas molecules effectively. The hea
 ters can operate at a ground-breaking high temperature of 550°C for an ul
 tra-low power consumption of 16 mW (continuous operation) and have a therm
 al rise time of below 10 ms. The yield of the micro-hotplates after deep R
 IE back-etching was close to 90% while the residual stress was found to be
  minimal\, resulting in flat and stable membranes. Electronic circuits for
  drive and readout have also been designed and integrated with the micro-h
 otplates to create a smart gas sensor.
LOCATION:CAPE building\, seminar room 21-23. 9 JJ Thomson Ave. CB3 0FA
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