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SUMMARY:Advanced resonant characterization of MEMS devices - Iskandar Sama
 d\, CAPE\, Engineering Department
DTSTART:20061101T140000Z
DTEND:20061101T150000Z
UID:TALK5746@talks.cam.ac.uk
CONTACT:Dr. Richard\, Yong Qing Fu
DESCRIPTION:An 'optical lever' setup has been developed for mechanical tes
 ting of micro mechanical (MEMS) structures. This system is assembled using
  off the shelf\ncomponents and allows study of a structures response to an
  internally applied mechanical excitation under different chamber pressure
 s below 1e-5 mbar and temperatures up to 160 oC. Data processing via Matla
 b allows the use of various modal analysis tools\, typically to determine 
 the samples resonant frequencies and respective quality factors. A study o
 f Silicon nitride and SU8 rectangular cantilevers using this setup is demo
 nstrated.\n
LOCATION:CAPE building\, seminar room 21-23. 9 JJ Thomson Ave. CB3 0FA
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