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Advanced resonant characterization of MEMS devices

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If you have a question about this talk, please contact Dr. Richard, Yong Qing Fu .

An ‘optical lever’ setup has been developed for mechanical testing of micro mechanical (MEMS) structures. This system is assembled using off the shelf components and allows study of a structures response to an internally applied mechanical excitation under different chamber pressures below 1e-5 mbar and temperatures up to 160 oC. Data processing via Matlab allows the use of various modal analysis tools, typically to determine the samples resonant frequencies and respective quality factors. A study of Silicon nitride and SU8 rectangular cantilevers using this setup is demonstrated.

This talk is part of the MEMS seminar series.

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